Ultrasonic motors using piezoelectric ceramic multimode vibrators

The development is reported of an ultrasonic motor using piezoelectric ceramic multimode vibrators consisting of circular or annular plates in which degenerate horizontal vibration modes of the same or different form are used. Two orthogonal nonaxisymmetric vibration modes were used in the same-form case, and the combination of a nonaxisymmetric vibration mode and a radial vibration mode was used in the different-forms case. Some details of the motor design and its experimental characteristics are presented. The ultrasonic motor presented here has a special advantage in its thin construction.<>