Preparation of VO2 microbolometer for CO2 gas detection

The VO₂ microbolometer has been prepared by micro electrical mechanical system (MEMS) bulk-silicon process for the application of infrared gas detection. The characteristic of the prepared microbolometer is tested. The experiments are carried out for detecting CO₂ gas concentration using the VO₂ microbolometer as detector. The results show that the responsibility is ~18.1kV/W, the detectivity is about 1.37 × 10⁸ cm Hz^1/2/W, and the thermal time constant is ~72.4ms. The gas sensing results shows that the prepared microbolometer can be used for CO₂ gas sensing.