New two-dimensional PBG structures for THz transmission line and antenna integrated design based on MEMS technology

Based on MEMS technology and finite element analysis (FEA), we design multi-kinds of efficient integrated functional elements utilizing two-dimensional (2-D) photonic bandgap (PBG) structures at 0.5 Terahertz (THz). The functional elements are integrated in the same silicon substrate using the micromachining technology for Micro-Electro-Mechanical Systems (MEMS), which can be used to construct easily the THz integrated systems. Consequently, the integrated design of the antenna-feed system is realized. The benefits of the integrated design lie in high efficient transmission and radiation, high reliability and high consistency. And the further improvement of the performance guidelines has a good perspective.