TRIZ: Systematic innovation towards factory operational efficiency

Semiconductor manufacturing faces numerous challenges and increased complexity in yield improvement, defect reduction and equipment related issues. Innovation is a key element to stay ahead of the competitors. Typically the way towards idea generation is Brainstorming. While it is easy to use, it is very much dependent on the experience and knowledge of the group of people. For new engineers, there is a certain degree of compromise to the solutions. This paper will introduce a systematic innovation methodology called Theory of Inventive Problem Solving (TRIZ). It is a structured methodology for modeling the problem, tools to work with the models and finally models of solutions. TRIZ is a recognized international science of creativity, based on the laws of physics and innovative patents distilled to numerous problem solving tools. It is a toolbox with 12 tools which provide the engineers with methods to create breakthrough ideas. This paper will describe 5 TRIZ methods (Trimming, Contradiction, 40 Inventive Principles, Process Analysis, Trends of Engineering System Evolution) and case studies will be shared.