Performance evaluation of a new novel planar interdigital sensors

A new novel planar interdigital sensor has been fabricated to have better sensing performance. The new sensors were fabricated using latest technology in sensor fabrication. The new sensors have four different layers which consist of conductor 1 for main trace and interdigitated capacitor trace, conductor 2 for thicker pads for series mount of resistor and other connections, dielectric dams for the surface mount resistor and a ground plane. Result from the experiments have shown that new novel sensor have better stability in term of amplitude and phase angle, very small resistive part and better shielding to reduce noise. It is also shown that new sensor has stable sensitivity measurement at different temperature.