Analyzing Properties of Pizeoelectric Substrates Incoporating Finite Element Method

Surface acoustic wave (SAW) devices are of great interest for chemical and biochemical sensing applications. As the new piezoelectric materials are produced and the development of SAW device substrates expands from single-layer to multi-layer, analyzing the properties of piezoelectric substrates becomes more and more difficult. In this paper, a method that applies finite element (FEM) simulator to analyze piezoelectric substrates was developed. To verify the feasibility of the proposed method, the coupling-of-modes (COM) parameters of piezoelectric substrate were calculated and then applied to design a SAW device. The simulation result of the device is compared with that obtained by equivalent circuit model.