Reactive gas-controlled arc process

There are many methods of particle reduction in the cathodic vacuum arc deposition process: film deposition by filtered arc, magnetic steering. Unfortunately, they are rather complicated and almost not practical for industrial application. We would like to suggest a method to reduce macroparticles, increase the deposition rate and improve the coating quality. This method is based on creation of emission-active phases on the cathode surface and changing the melting point of surface layers of the cathode material and its work function. A comparison of coating smoothness, deposition rate, micro hardness and adhesion between reactive gas controlled arc (RGCA) and the regular process was made. Optical emission spectroscopy was used for investigation of changes in the plasma generation process.