A novel micro paramagnetic oxygen sensor

This paper describes a novel paramagnetic sensor for oxygen measurement fabricated in MEMS technology. The sensor is based on the paramagnetic characteristics of oxygen using a permanent magnet for switching the gas flow of the sample gas in a measuring channel and gauging the flow velocity, which depends on the oxygen concentration in the sample gas. Since the sensor measures the velocity using thermo anemometers without any moving components it is not limited to stationary applications.