Temperature compensated solidly mounted resonators with thin SiO2 layers

Temperature compensation is becoming more and more a high demand for RF filters in order to successfully meet the tightening specifications over a wide range of temperatures. We show our results on temperature compensation by adding thin SiO₂ layers at high stress regions inside the resonator. We examine the effect of adding the SiO₂ layer on the resonators properties and we extract an accurate value to the temperature coefficient of stiffness of thin film SiO₂.