Zero mass loading sensitivity of the S0 Lamb wave resonance in thin film plate acoustic resonators (FPARs)

Synchronously designed FPARs are typically operating at the upper edge of the frequency stopband due to the negative reflection coefficient of the lowest order symmetric Lamb wave (S0) in periodical strip gratings. In this study the possibility to achieve 0-sensitivity of the upper stopband edge with respect to electrode thickness tolerances is discussed for AlN based FPARs employing Al strip reflectors. 0-sensitive topologies are identified through FEM COMSOL experiments.