Further generalized four-port de-embedding method by dropping ideality assumptions on the THROUGH structure

Four-port on-wafer de-embedding is necessary for on-wafer measurement at frequencies above 50 GHz. We found notable discrepancy between the Y-parameters de-embedded using different options provided by a recently published general four-port de-embedding algorithm to solve the four-port Y-parameter matrices. The problem is caused by the ideality assumptions on the internal THROUGH test structure. In this paper, we develop a further generalized algorithm that drops any ideality assumption except passivity on the THROUGH structure. The new method works for transistor S-parameters with or without Impedance Standard Substrate calibration.