A resistive switch device based on SbTeN chalcogenide film

To meet the needs of the next-generation programmable switch circuit, we propose a SbTeN-based resistive switch device, which unifies the functions of the pass transistor and the SRAM-cell, has non-volatility, and passes endurance specification. By adding an optimum nitrogen-content in a SbTe film, the on-resistance reduction is successfully demonstrated, which is considered to be the first solution to meet the needs for low-power consumption.