Design and simulation of folded split gate SONOS memory

A new 2-bit/cell SONOS flash memory device is designed and simulated with a numerical simulation tool. The device has a recessed channel and a supplementary gate named a select gate. The select gate is appended to enhance the program efficiency by source-side injection (SSI) as well as to separate the charge storage nodes physically. The designed structure looks like a folded form of conventional one, so that we call the device folded Split ,{late (FSG) memory.