FE analyses and prototype testing of a piezoresistive LTCC-based low-pressure sensor

In this paper we present some results of our investigation of a thick-film piezoresistive LTCC-based pressure sensor aimed at applications in the low-pressure range. A series of test sensors was manufactured and characterized. Among the experimental tests the numerical analyses were performed to show the trends and to help reveal the impact of some design parameters. The sensor's resolution, linearity, hysteresis, and offset stability are discussed. The obtained results are favourable for the prospects of applications.