An active rectifier-phase shifted ZVS-PWM DC-DC converter with HF planar transformer-link for RF plasma power generator

This paper presents the zero voltage switching (ZVS) PWM dual full bridge (DFB) DC-DC converter with secondary-side phase-shifting power control scheme. The soft-switching PWM DC-DC converter newly developed for a DC pre-regulator in a plasma radio frequency (RF) power generator can achieve soft commutation at all the power devices under the wide range of load power. By introducing the phase-shifting control scheme that is based on the secondary-side rectifier of the high-frequency (HF) planar transformer, it can attain the effective reduction of idling power in the primary-side inverter as well as the completely recovery-less diode commutations in the secondary-side rectifier. The experimental operating performance, power loss analysis and actual conversion efficiencies of the DC-DC converter are described to verify the soft-switching circuit, and the feasibility is discussed from the practical point of view.