Implementation and characterization of a tunable quality factor micromachined inductor

This study demonstrated a novel tunable quality factor and self-assembly inductor using an alternating magnetic flux. The merit of the design was to tilt the inductor from the lossy substrate and localize welding for assembly simultaneously using the magnetic film. The 8-turn of meander strip inductor with a thickness of 10 µm was fabricated using MicroElectroMechanical Systems (MEMS) technology. The RF performance of the inductor at various tilting angles away from the substrate (0°, 45°, and 90°) was characterized by using a two-port vector network analyzer (VNA). The measurement results indicated that the quality factor (Q) and the self-resonant frequency (fres) can be enhanced about 107% and 1.08%, respectively.