Micro- / nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.