Design and simulation of a micro-electro-mechanical switch

This study contains the design and simulation of a MEMS switch for a micro piezoelectric voltage generator system. This switch is electro-statically actuated by the voltage generated by the micro piezoelectric system that has a low range as 0.6–1V. Thus, an optimization is required to decide the size of the switch and the material to be used that are suitable for pull-in voltage range. In this optimization, a closed form model of pull-in voltage is used. The switch should work far away from resonant frequencies. Due to this constraint, a resonant frequency analysis must be investigated and it is required to decide which sizes and materials are convenient. Also, the system needs an ideal switch meaning that it should have a low resistance. What is more, we want the switch to have a hysteretic behavior meaning that pull-in and pull-out voltages should be different. As the system will work in a vibrating environment, not only electrical but also mechanical analyses like tip deflection analysis and response under instant accelerations play a big role to decide whether the switch pulls in below the required voltage, or not.