High divider ratio fast response capacitive dividers for high voltage pulse measurements

The paper reports the experimental results of the development of a novel capacitive divider for high voltage pulse measurements. The low voltage arm capacitor was prepared by thermally growing silicon oxide on commercially available silicon wafers to form capacitors of very large capacitance per unit area (>10 nF with 2 /spl mu/m oxide thickness on a 30 mm diameter wafer). With the proposed design for LV arm capacitance, divider ratios of the order >10000 can easily be obtained. Further studies have been carried out to improve the response time of this high division ratio divider.