A new magnetically actuated switch for precise position detection

This paper reports on a new component which allows a mechanical position to be accurately detected. This component is a magnetically actuated microswitch fabricated in MEMS technology. Unlike the well-known Reed or Hall switches components this magnetic microswitch offers all of the following advantages: - a powerless sensor, - a highly integrated sensor (less than 3mm³), - an electrical isolation (dry contact) - a high position accuracy (no component dispersion), - an easy implementation in real applications, thanks to a well verified analytical model. Position detection accuracy of the sensor as well as electrical and reliability tests results are reported.