Novel voltage controlled spatial modulation method for digital microshutter display with high performance

In this work, we have proposed a novel voltage controlled spatial modulation method for a digital microshutter display. A single pixel is composed of multiple sub-microshutters with the same characteristics. And the grayscale level of it is modulated by the number of actuated sub-microshutters controlled by applied voltage distribution in floating counter electrodes and hysteresis phenomenon in electrostatic microshutters. Through the proposed modulation method, the microshutter having low operation voltage under 20 V together with large deflection of quarter circle shape has been demonstrated.