RF-CMOS-MEMS based frequency-reconfigurable amplifiers

Chips from a foundry RF process are post-processed to release MEMS passive devices and enable single-chip reconfigurable circuits. A MEMS variable capacitor, capable of 7:1 tuning ratio, reconfigures a narrow-band low-noise amplifier and a power amplifier over a 1 GHz frequency range. A suspended MEMS inductor, with > 50% improvement in Q, lowers amplifier power consumption.