Emission uniformity of nanocrystalline silicon based metal-oxide-semiconductor cathodes

In this paper, we report on the evaluation of the emission uniformity in the emission area of the cathodes by using a Faraday-cup with a probe hole of 20 mum in diameter. In the experiments, the cathodes were operated in pulse mode with the frequency of 100 Hz with pulse width of 250 mus in a vacuum of 10"8 Pa.