A highly automated testing facility for calibration and performance testing of mass flow controllers

A highly automated testing laboratory has been developed at the Oak Ridge National Laboratory towards the goal of improving the mass flow controller (MFC) and its impact on the semiconductor community. Developed initially for SEMATECH, this facility has validated and implemented many of the SEMATECH Semaspec test methods for mass flow controllers, which are now becoming SEMI standards. The facility features several testbeds for the evaluation of MFC reliability, accuracy, surrogate gas factors, and process gas calibrations, in addition to many other aspects of mass flow controllers and other low flow devices. The facility is highly automated, with many test methods being performed in a virtually "hands-off" mode. Integral in this facility is the gravimetric calibrator, a true mass flow device which allows the rapid calibration of flow devices against hazardous and corrosive process gases to the level of approximately 0.3% of reading. The capabilities of this facility have been demonstrated through baseline MFC performance for the SEMI-SEMATECH member companies. The facility is now being opened as a Department of Energy National User Facility, enabling MFC manufacturers, equipment suppliers, and end users access to all facility capabilities for development and evaluation work of the MFC.