Monolithic integration of GaInAsP/InP collimating GRIN lens with tapered waveguide active region

A GaInAsP/InP collimation GRIN lens monolithically integrated with a tapered waveguide laser was realized, and a circular beam divergence (/spl theta//sub p/=7/spl deg/, /spl theta//sub /spl perp//=7.5/spl deg/) was obtained with an output width of 15 /spl mu/m and a core thickness of the GRIN lens of about 8 /spl mu/m.