Study on Software and Hardware Control of High-Precision Measurement Platform for Optical Aspheric Surface

Taking high generality and efficiency into account, this paper presents a measurement and control means based on high-precision measurement platform including high-precision linear motors, contacting and non-contacting measurement sensor of 0.1um resolution and a new developed of measuring software. This platform aims to achieve high-precision measurement for all kinds of optical aspheric workpieces for the detection accuracy of 2um/200*200mm. In this paper, a measurement platform which consist of granite gantry framework, 3 axes linear motors, circle grating rotary encoder, grating linear scales, 4 axes motion control card, linear motion ball guide, contacting and non-contacting measurement sensor and so on, is designed and implemented. Through finite element stress analysis, it can find that the framework well fulfills the accuracy demand. After designed the hardware of measurement platform, the related control software is developed. Finally, the experiments for this purpose are done to validate the measurement platform accuracy.