A compact SPDT RF MEMS switch with high contact force

This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS single-pole double-throw (SPDT) switch with low sensitivity to stress gradients. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and excellent microwave performance to >30 GHz. To our knowledge, this is the smallest high-performance SPDT switches to-date (0.04 mm²).