A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitation

In this paper, a new silicon resonant gyroscope (angular rate sensor) is presented. Its concept is based on the tuning fork principle: two proof masses suspended by four beams are vibrating antiphase in one plane. When rotating, the proof masses are moving out of this plane due to the Coriolis force. The excitation is provided by electromagnetic forces and the detection is realized by means of four piezoresistors connected in a Wheastone bridge configuration. The first characterization of three prototype gyroscopes has been successfully performed at angular rates ranging from -750 deg/sec to 750 deg/sec. They displayed promising features, in particular an excellent linearity.