Microresonator sensor arrays

A high-sensitivity sensor and sensor array is proposed which can be used for infrared (IR) detection and imaging, and for chemical, biological agent and other types of sensing. The sensing elements consist of microresonators. Calculation shows that an array of microresonators in the 200 MHz to 1 GHz range can be the basis of an uncooled IR imaging system with a noise equivalent temperature difference, NETD, of <0.01 K which is superior to the (actual) performance of state-of-the-art uncooled imaging arrays and is competitive with cryogenically cooled imaging arrays. The frequencies of microresonators are sensitive to both the mass loading and the temperature changes produced by adsorption/desorption and chemical reactions. That the two frequency changes are independent can be exploited for chemical and biological sensors which are both sensitive and selective. The design and fabrication problems to be overcome before such microresonator arrays can be realized are discussed.