Comparison of on-wafer multiline TRL and LRM+ calibrations for RF CMOS applications

This paper presents a quantitative comparison of the reference multiline TRL and LRM+ for a customized set of standards in a CMOS process using IBM's 0.13 mum technology. This comparison was undertaken for the first time and covered a frequency range from 1 to 110 GHz. It was demonstrated that the accuracy of the on-wafer multiline TRL and LRM+ calibration were in very good agreement. Both methods outperform the conventional off-wafer calibration with the DUT contact pad parasitics de-embedded.