Piezoelectrically transduced single-crystal-silicon plate resonators

We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two resonator types are presented: one operates in the square extensional mode at 26 MHz with Q~18000 and motional resistance R_m~0.240 kOmega, while the other resonator features a resonance at 22 MHz with Q~51000 and R_m~1.5 kOmega. The resonators are characterized electrically and by scanning laser interferometry. Measured vibration fields are compared to simulated eigenmodes.