Scaling and variability analysis of CNT-based NEMS devices and circuits with implications for process design

This work presents an extensive scaling analysis of carbon nanotube (CNT) based Nano-Electro Mechanical Switches (NEMS) considering the effect of process variations on both device and circuit level metrics. Implications for NEMS- material, switch architecture and geometry are also analyzed in detail. A rigorous nano-electromechanical simulation methodology in employed to study the operation and reliability of CNT-NEMS devices. It is shown that CNT-NEMS structures become increasingly susceptible to stiction failure and violating performance requirements as feature size scales down, thereby highlighting the need for advanced nanofabrication techniques if these structures are to be integrated in digital ICs.