Performance Index Evaluations of a Micro Axial-flux Switched-reluctance Motor

For supplying adequate driven force with high operational precision in semiconductor manufacturing industry, construction of a low cost device that can be integrated with the micro-electromechanical system (MEMS) fabrication scheme has been investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS constructions being considered, magnetic characteristics of a micro axial-flux switched-reluctance motor (muAFSRM) will be carefully analyzed by both analytical modeling and three-dimensional finite element analysis. Supported by a laboratory prototype, the generated torques and attract forces at different pole gaps and overlapped areas of the motor can be evaluated to provide thorough performance indices for relative micro-machine designs and operations