Low-Loss Coplanar Waveguide Transmission Lines and Vertical Interconnects on Multi-Layer Parylene-N

Coplanar waveguide transmission lines and vertical interconnects are implemented on a thick (15 mum) Parylene-N dielectric layer over a lossy CMOS-grade Si substrate. Devices are measured up to 40 GHz and show very low loss behavior. Low loss tangent and low dielectric constant characteristics of Parylene-N result in significant improvement of transmission lines and interconnects compared to those implemented in a standard Si integrated circuit technology.