Design of a micromechanical system utilizing hydrogel force for controlling a microvalve

A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.