The design and characterization of high performance soleno air gap on-chip inductor

In this study, a high quality on chip solenoid inductor with air gap structure were designed and fabricated. The inductor with laterally laid out solenoid structure can save a lots of chip area and obtains high Q value. The measured maximum quality factor Q of the solenoid inductor is 8.8 at 1.7 GHz. Besides, the study of the mechanical properties of the suspended inductors indicates that they can withstand large shock and vibrations.