Structure design of a high-sensitivity MOEMS accelerometer

A novel MOEMS accelerometer based on the principle of optical lever was present. The principle and structure design of the acceleration sensor are given. The simulation results performed in FEA agrees with the theoretical analysis well. The sensor was fabricated with the bulk micromachining fabrication process. In one silicon chip, several elements were integrated including the silicon cantilevers and proof mass. The experiments demonstrated that this optimization design has good performances of static resolution is about 1x10⁻4 g , dynamic range ±20g and the resonant frequency up to 1 kHz, while the packaged volume is less than 10cm³.