Technologies and materials for memory with full compatibility to CMOS

As CMOS scaling continuous successfully, technologies for integrating both memory and logic together is highly desirable for high performance and low-power system-on-chip (SOC) with full CMOS compatibility, such as Logic based NVM, floating-body DRAM, MiM based eDRAM, PC-RAM, RRAM, MRAM, FeRAM, ...etc.. New materials (e.g. GST, metal-oxide, high-k, magnetic junction, ...etc.) have greater compatibility in BEOL. Thus, fully CMOS compatible SOC is a promising trend into the future.