Development of low-voltage fluid-based inclination sensor integrated with CMOS circuitry on ceramic substrate

A low-voltage and fluid-based inclination sensor has been developed with one-side electrode structure at the supply voltage of 1.3 V which used in most digital circuitry. The consumption current of the inclination sensor was decreased from 250 μA at Vdd 3.3 V to 38 μA at Vdd 1.3 V by replacing an operational amplifier to an inverter amplifier in the capacitance detection circuitry of the sensor. The sensor and detection circuitry was integrated on one ceramic substrate. The sensitivity, response time and resolution of sensor were 7 mV/deg, 0.7 s and 0.75 ° respectively at the supply voltage of 1.3 V.