A semiconductor nanobridge biosensor for electrical detection of DNA hybridization

In this paper, the modeling, fabrication and optimization of the proposed nanobiosensor for detection of biomolecules such as DNA hybridization has been studied and different advantages and disadvantages of such a device are discussed. This paper outlines how the modulation of impedance in a novel silicon nanobridge (nanowire) biosensor can be used in characterizing biochemical species such as a antibodies/antigens or for detection of a particular DNA sequence hybridization. The array of biosensors fabricated from a SOI wafer with the thickness of 50 nm are studied and simulations are carried out using the TCAD simulator (MEDICI) softwares.