Photoluminescence enhancement of Silicon-rich silicon nitride film induced by silver localized surface plasmon

The photoluminescence of Silicon-rich silicon nitride (SRSN) film was enhanced by coupling with the localized surface plasmon of Ag island film. It is found that the deposited Ag film induces an enhancement of excitation of SRSN film through increasing the absorption of SRSN film. Furthermore, it is demonstrated that the emission enhancement is much more decided by the excitation wavelength than by the Ag island scattering.