Interdigitated Array Electrodes with Nano Gaps Using Optical Lithography and Controlled Undercut Method

Interdigitated array (IDA) electrodes with nano-gaps were fabricated using a newly developed optical lithography and controlled undercut method. Nano gaps of 250 nm between electrodes were developed while maintaining a large electrode area. The developed electrodes with nano gaps were applied as an electrochemical biosensor for the detection of poly-aminophenol (PAP) with 10
^-7
M detection limit. This method may enable the mass-production of disposable biosensors based on the nano-gap IDA electrodes.