Method of three-point for measurement error of microstructure table three dimension motion based on machine vision

Based on machine vision, the paper describes a new method that measurement error of six degrees of freedom microstructure table 3D posture. The method can measure the place and stance of 3D targets by monocular vision. Make centre of three fixed standard small spheres at microstructure table as mark points characterize the pose of table in 3D space. The fixed camera trace the spheres at table by vision in 3D space and measure quantitative changes of spheres’ position and diameter in eyeshot then ascertain the 3D coordinates spheres centre. Build the mapping model from image space to natural space. In this way we can ascertain the posture of table in 3D space and measure the kinematics error of table at every sampling time.