MEMS-based slow-wave sheet-beam amplifier

New micro-machining technologies are being evaluated for applicability to millimeter-wave RF devices. Sample RF circuits have been fabricated on diamond, sapphire, and SiO2-coated silicon wafers; wire patterns (1 μm thick) have been optically patterned in aluminum and molybdenum. Dispersion for such a circuit is examined as as well as electron/RF interaction.