The Effect of Substrate Clamping on Piezoelectric Thin-Film Parameters

The behaviour of the piezoelectric materials is determined by its coefficient d33 which describes the strain parallel to the polarization vector of the ceramics. Full sheet characterization is essential to understand material behavior when it's clamped on the substrate. In this work, full field 3D non-contact surface measurements based on optical interferometer from FOGALE Nanotech with vertical resolution down to 0.1 nm is used to measure the piezoelectric coefficients of PZT thin film. The measurements analysis predicts a reduction of 50% for the d33 values.