Structure and Magnetic Properties of FeCr Sputtered Films

The structure and magnetic properties of FeCr sputtered films were studied, and the conditions for perpendicular magnetic anisotropy investigated. Results indicated that films sputtered at an input power of 200 W were bcc, but at lower input powers a σ phase appeared, and films had a perpendicular anisotropy, possibly due to an observed columnar microstructure. When a focusing magnetic field was applied during sputtering, there was less bcc phase material and more of the σ phase.