Preparation of TbFeCo Films by Two Source Magnetron Sputtering

The magnetic and magneto-optical properties of TbFeCo films formed on glass substrates by two-source (FeCo and Tb) magnetron sputtering, while varying the RF input power, Ar gas pressure, and subtrate rotation speed, are reported. By independent variation of the input power for the two sources, many different film compositions were obtained. The film M_s, perpendicular anisotropic energy K_⊥ and Kerr rotation angle ⊥_K were all fairly stable for substrate rotation speeds of 20 rpm or above, below this all three values increased as the speed was decreased.