Study on Magnetically Levitated Conveying System Using Hybrid-Magnetized High $T{\rm c}$ Superconductors

As an application of superconductors, we propose a magnetically levitated conveying system for clean rooms or vacuum chambers of semiconductor manufacturing industry. By using the pinning effect of superconductors, it is possible to make a stable levitation system without any mechanical contacts. This system consists of a levitated conveyer and a pair of magnetic rails.