Research on the Modulating of the Desktop Micro Forming System to Micro Factory

The micro pump module is used in so many MEMS applications, such as medical, fuel cell, display and chemistry fields. The micro pump module is consisted of actuating component, chamber plate, upper/lower fluidic channel plates and thin valve. This micro pump must have a specific performance that is high compressibility and high speed operating response. A polymer thin film is used as a valve component in micro pump module. But this polymer thin film has a low elastic characteristic so cannot operate with high frequency. If this polymer thin valve can be changed to metallic material, thin valve component can operate with high frequency because metal has a high elastic characteristic. As forming components are small in size, forming equipment must also be small in size because the forming die and load must be small. The micro forming press system is high precision forming equipment that can manufacture the precision component. This precision component has a size of several micros to millimeters and precision of sub-micro to micrometer. In this paper, we research about the metallic thin foil valve manufacturing technology to have a high frequency response. This metallic valve has a 30μm thickness and minimum pattern size of 500μm. And we develop the miniaturized press system that has a desktop size and a precision compound die set. This compound die set can operate in piercing and blanking process.