Wonderful new materials or yield killers? New metrics for metal contamination assessment

A new metrics for metal contamination assessment has been developed, based on three key factors: the detrimental impact, the control capability and the cross-contamination risk. This system is currently being used to manage the introduction of new materials such as high-k and metal gate at IMEC's pilot line. At the same time it forms the basis of the new contamination protocol fully implemented in our 300 mm facility.